Edwards STPA1603C磁懸浮高真空分子泵
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產(chǎn)品名稱: Edwards STPA1603C磁懸浮高真空分子泵
產(chǎn)品型號(hào): YT4616004
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards STPA1603C磁懸浮高真空分子泵
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Edwards STPA1603C Turbomolecular Vacuum Pump - NEW
The small and powerful Edwards STPA1603C turbomolecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.
Advanced Rotor Design
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Increased performance
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Higher gas throughput
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High reliability
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Maintenance free
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Harsh process compatible
5 Axis Magnetic Suspension System
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Zero contamination
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Low vibration
Corrosion Resistant
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Harsh process compatible
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Increased life
Compact Design
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Small footprint
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Half rack controller
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
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Inlet flange
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ISO-200F
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Outlet port
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KF-40
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Purge port
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KF-10
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Water cooling fitting
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PT1/4
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Pumping speed
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N2
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1,600 l/s
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H2
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1,200 l/s
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Compression ratio
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N2
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> 108
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H2
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> 7 x 103
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Ultimate pressure w/ bake out heating
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10-7 Pa (10-9 Torr)
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Max. allowable backing pressure
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266 Pa (2 Torr)
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Max. nitrogen throughput
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2,500 sccm
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Rated speed
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Starting time
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7 min
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Mounting position
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Any
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Water cooling flow
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2 l/min-1
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Temperature
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5 - 25°C
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Pressure
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0.3 MPa
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Recommended purge gas flow
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20 - 50 sccm
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Input voltage
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200 to 240 VAC
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Power consumption
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0.85 kVA
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Weight
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35 kg
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Edwards STPA1603C Turbomolecular Vacuum Pump - NEW
P/N B751-00-010 / B75100010 STPA1603C ISO-200F
P/N B751-00-100 / B75100100 STPA1603C DN 200 CF
P/N YT46-16-003 / YT4616003 STPA1603CV VG200 TMS
YT46-16-004 / YT4616004 STPA1603CV ISO-200F TMS
YT46-16-030 / YT4616030 STPA1603CV ISO-250F TMS
YT46-16-004 / YT4616004 STPA1603CV ISO-200F TMS
YT46-16-005 / YT4616005 STPA1603CV DN 200 CF TMS
YT46-0Z-000 / YT460Z000 STPA1603C VG200
YT46-B0-060 / YT46B0060 STPA1603C ISO-200F
YT46-0Z-030 / YT460Z030 STPA1603C ISO-250F
